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MEMS
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Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Temperature
Keyword:
Relative Humidity
,
MEMS
,
Temperature
,
Pressure
, and
Sensor
Creator:
Johari, Houri
Advisor:
Pryputniewicz, Ryszard J.
and
Savilonis, Brian James
Publisher:
Worcester Polytechnic Institute
Date Created:
2003-05-12
Resource Type:
Thesis
Degree:
ME
Unit (Department):
Mechanical Engineering
A Selective Encapsulation Solution For Packaging An Optical Micro Electro Mechanical System
Keyword:
die warpage
,
die bow
,
electronics
,
wirebonds
,
encapsulate
,
MEMS
,
packaging
,
micro electro mechanical systems
,
encapsulant
,
Corrosion
, and
electrochemical migration
Creator:
Bowman, Amy Catherine
Advisor:
Sisson, Richard D.
Publisher:
Worcester Polytechnic Institute
Date Created:
2002-01-08
Resource Type:
Thesis
Degree:
MS
Unit (Department):
Materials Science & Engineering
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Masters Theses
10
PhD Dissertations
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2014
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Creator
Akdemir, Kahraman Daglar
1
Arecco, Daniel
1
Blocher, Garth M
1
Bowman, Amy Catherine
1
Deshpande, Anjali W
1
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Creators
»
Advisor
Furlong-Vazquez, Cosme
3
King, Brian M.
1
Pryputniewicz, Ryszard J.
7
Savilonis, Brian James
1
Sisson, Richard D.
1
Contributor
Blandino, John J.
1
Brown, Christopher A.
1
Burnham, Nancy A.
1
Cyganski, David
1
Furlong, Cosme
5
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Unit (Department)
Electrical & Computer Engineering
1
Materials Science & Engineering
1
Mechanical Engineering
10
Publisher
Worcester Polytechnic Institute
12
Resource type
Thesis
10
Dissertation
2