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Filtering by: Contributor Marinis, Thomas F. Remove constraint Contributor: Marinis, Thomas F. Unit (Department) Mechanical Engineering Remove constraint Unit (Department): Mechanical Engineering

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Development of a modular interferometric microscopy system for characterization of MEMS

Keyword:

Interferometry, shape and deformation measurement, Vibration, thermal, MEMS, vacuum, scanning white light, and vibrometry

Creator:

Klempner, Adam R.

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2007-01-04

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering
Laser beam interaction with materials for microscale applications

Keyword:

Laser micromachining, lattice-phonon vibration, numerical calculations, plasma effects, Fourier theory, hole profile, Silicon, analytical solutions, Heat Transfer, hole formation, MEMS, laser microdrilling, laser beam characteristics, and 304 stainless steel

Creator:

Nowakowski, Krzysztof A.

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2005-12-12

Resource Type:

Dissertation

Degree:

PhD

Unit (Department):

Mechanical Engineering
Study and characetrization of plastic encapsulated packages for MEMS

Keyword:

MEMS, packaging, plastic encapsulation, finite difference methods, OEH methodology, and Fick's second law of diffusion

Creator:

Deshpande, Anjali W

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2005-01-14

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering
Computational and experimental investigations of laser drilling and welding for microelectronic packaging

Keyword:

Microdrilling, Microelectronic packaging, Computational modeling, Laser micromachining, Optoelectronic holography, and Microwelding

Creator:

Han, Wei

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2004-05-13

Resource Type:

Dissertation

Degree:

PhD

Unit (Department):

Mechanical Engineering

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Creator

Deshpande, Anjali W1
Han, Wei1
Klempner, Adam R.1
Nowakowski, Krzysztof A.1

Advisor

Pryputniewicz, Ryszard J.4

Contributor

Burnham, Nancy A.1
Furlong, Cosme3
Liang, Jianyu1
Marinis, Thomas F.[remove]4
Pryputniewicz, Ryszard J.4
more Contributors »

Unit (Department)

Mechanical Engineering[remove]4

Publisher

Worcester Polytechnic Institute4

Resource type

Dissertation2
Thesis2

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