Laser micromachining is essential in today’s advanced manufacturing, of e.g., printed circuit boards and electronic components, especially laser microdrilling. Continued demands for miniaturization, in particular of high-performance MEMS components, have generated a need for smaller holes and microvias as well as smaller and more controllable spot-welds than ever before. All these neeeds require smaller taper of the microholes and more stable and controlled laser micromachining process than currently available. Therefore considerable attention must be focused on the laser process parameters that control critical specifications such as accuracy of the hole size as well as its shape and taper angle, all of which highly influence quality of the laser micromachining processes. Determination of process parameters in laser micromachining, however, is expensive because it is done mostly by trial and error. This Dissertation attempts to reduce the experimental time and cost associated with establishing the process parameters in laser micromachining by employing analytical, computational, and experimental solutions (ACES) methodology.

Creator

• Nowakowski, Krzysztof A.

Contributors

• Marinis, Thomas F.
• Sisson, Richard D.
• Furlong, Cosme
• Pryputniewicz, Ryszard J.

Degree

• PhD

Unit

• Mechanical Engineering

Publisher

• Worcester Polytechnic Institute

Language

• English

Identifier

• etd-121205-135626

Keyword

• Laser micromachining
• lattice-phonon vibration
• numerical calculations
• plasma effects
• Fourier theory
• hole profile
• Silicon
• analytical solutions
• Heat Transfer
• hole formation
• MEMS
• laser microdrilling
• laser beam characteristics
• 304 stainless steel

Advisor

• Pryputniewicz, Ryszard J.

Committee

• Furlong, Cosme
• Marinis, Thomas F.
• Sisson, Richard D., Jr.

Defense date

• 2005-12-12

Year

• 2005

Date created

• 2005-12-12

Resource type

• Dissertation

Rights statement

• In Copyright

Last modified

• 2021-02-02