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Pryputniewicz, Ryszard J.
Remove constraint Advisor: Pryputniewicz, Ryszard J.
Keyword
MEMS
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Development and implementation of automated interferometric microscope for study of MEMS inertial sensors
Keyword:
MEMS
,
automation
,
Interferometry
, and
gyroscope
Creator:
Marinis, Ryan Thomas
Advisor:
Pryputniewicz, Ryszard J.
Publisher:
Worcester Polytechnic Institute
Date Created:
2009-05-07
Resource Type:
Dissertation
Degree:
PhD
Unit (Department):
Mechanical Engineering
Development of a modular interferometric microscopy system for characterization of MEMS
Keyword:
Interferometry
,
shape and deformation measurement
,
Vibration
,
thermal
,
MEMS
,
vacuum
,
scanning white light
, and
vibrometry
Creator:
Klempner, Adam R.
Advisor:
Pryputniewicz, Ryszard J.
Publisher:
Worcester Polytechnic Institute
Date Created:
2007-01-04
Resource Type:
Thesis
Degree:
MS
Unit (Department):
Mechanical Engineering
Laser beam interaction with materials for microscale applications
Keyword:
Laser micromachining
,
lattice-phonon vibration
,
numerical calculations
,
plasma effects
,
Fourier theory
,
hole profile
,
Silicon
,
analytical solutions
,
Heat Transfer
,
hole formation
,
MEMS
,
laser microdrilling
,
laser beam characteristics
, and
304 stainless steel
Creator:
Nowakowski, Krzysztof A.
Advisor:
Pryputniewicz, Ryszard J.
Publisher:
Worcester Polytechnic Institute
Date Created:
2005-12-12
Resource Type:
Dissertation
Degree:
PhD
Unit (Department):
Mechanical Engineering
Study and characetrization of plastic encapsulated packages for MEMS
Keyword:
MEMS
,
packaging
,
plastic encapsulation
,
finite difference methods
,
OEH methodology
, and
Fick's second law of diffusion
Creator:
Deshpande, Anjali W
Advisor:
Pryputniewicz, Ryszard J.
Publisher:
Worcester Polytechnic Institute
Date Created:
2005-01-14
Resource Type:
Thesis
Degree:
MS
Unit (Department):
Mechanical Engineering
Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor
Keyword:
absorption
,
vibrometry
,
MEMS
,
Vibration
,
SEM
,
Hydrogen
,
Polymer
,
micromechanical
,
optoelectronic
,
cantilever
,
Sensor
,
frequency
,
AFM
,
Holography
,
Detection
,
Silicon
,
palladium
,
chemical
, and
resonance
Creator:
Arecco, Daniel
Advisor:
Pryputniewicz, Ryszard J.
Publisher:
Worcester Polytechnic Institute
Date Created:
2004-05-11
Resource Type:
Thesis
Degree:
MS
Unit (Department):
Mechanical Engineering
Modeling of a folded spring supporting MEMS gyroscope
Keyword:
statics
,
folded springs
,
MEMS
,
gyroscope
, and
suspension
Creator:
Steward, Victoria
Advisor:
Pryputniewicz, Ryszard J.
Publisher:
Worcester Polytechnic Institute
Date Created:
2003-10-07
Resource Type:
Thesis
Degree:
MS
Unit (Department):
Mechanical Engineering
Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Temperature
Keyword:
Relative Humidity
,
MEMS
,
Temperature
,
Pressure
, and
Sensor
Creator:
Johari, Houri
Advisor:
Pryputniewicz, Ryszard J.
and
Savilonis, Brian James
Publisher:
Worcester Polytechnic Institute
Date Created:
2003-05-12
Resource Type:
Thesis
Degree:
ME
Unit (Department):
Mechanical Engineering
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Creator
Arecco, Daniel
1
Deshpande, Anjali W
1
Johari, Houri
1
Klempner, Adam R.
1
Marinis, Ryan Thomas
1
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Advisor
Pryputniewicz, Ryszard J.
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7
Savilonis, Brian James
1
Contributor
Blandino, John J.
1
Burnham, Nancy A.
1
Furlong, Cosme
5
Grabbe, Dimitry
1
Hagglund, Raymond R.
2
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Unit (Department)
Mechanical Engineering
7
Publisher
Worcester Polytechnic Institute
7
Resource type
Thesis
5
Dissertation
2
