Worcester Polytechnic Institute has an unused and very valuable piece of equipment in the basement of Higgins Lab. This piece of equipment is the Photolithography machine. It has not been running in a decade and would cost an incredible amount to have it sent in to be fixed. A machine like that would be very useful for research purposes due to the uses of photolithography in micro builds and circuits. The purpose of this MQP was to build a mechanical work around for the old mask aligner system and allowing the machine to be revived in the future. The precision of this work around has been undefined but expected to be within a few microns with plans laid out for improvements.

• This report represents the work of one or more WPI undergraduate students submitted to the faculty as evidence of completion of a degree requirement. WPI routinely publishes these reports on its website without editorial or peer review.

Creator

• Klimkiewicz, Mateusz

Publisher

• Worcester Polytechnic Institute

Identifier

• E-project-042519-124541

Advisor

• Daniello, Robert

Year

• 2019

Date created

• 2019-04-25

Resource type

• Major Qualifying Project

Major

• Mechanical Engineering

Rights statement

• In Copyright