Currently, Saint-Gobain Abrasives team uses the Chemical Mechanical Planarization (CMP) process to manufacture multiple products. Cubic Boron Nitride grain orientation has not been optimized which could increase the life of the conditioning pad integral to the CMP process. Our team designed a set of experiments to obtain the optimal grain angle to increase the maximum bonding force thus increasing the life of the conditioner tool. We analyzed each new angle and assembled a final optimal grain orientation.

• This report represents the work of one or more WPI undergraduate students submitted to the faculty as evidence of completion of a degree requirement. WPI routinely publishes these reports on its website without editorial or peer review.

Creator

• Yuhas, Nathaniel James
• Ascioti, Francis Lee

Publisher

• Worcester Polytechnic Institute

Identifier

• E-project-041014-132709

Advisor

• Rong, Yiming

Year

• 2014

Center

• Wuhan, China Project Center - MQP

Sponsor

• Saint-Gobain

Date created

• 2014-04-10

Ort

• Wuhan

Resource type

• Major Qualifying Project

Major

• Mechanical Engineering

Rights statement

• In Copyright