DEVELOPMENT OF A POST-FABRICATION STIFFNESS CHARACTERIZATION TOOL FOR MEMS
PubblicoContenuto scaricabile
open in viewerMicro-Electromechanical Systems (MEMS) manufacturers face difficulties in characterizing material properties of MEMS post production. Properties such as stiffness can be obtained from simultaneous force and displacement measurements in full-field. We developed a prototype MEMS metrology system that uses a sub-micro Newton resolution force probe operating under a nanometer resolution interferometer to characterize MEMS mechanical properties. FEA simulations and analytical calculations were performed to help determine system constraints and validate results. Precision actuators were integrated and controlled from a developed graphical user interface. The system was tested on an Analog Devices ADXL202 accelerometer.
- This report represents the work of one or more WPI undergraduate students submitted to the faculty as evidence of completion of a degree requirement. WPI routinely publishes these reports on its website without editorial or peer review.
- Creator
- Publisher
- Identifier
- E-project-042717-143702
- Advisor
- Year
- 2017
- Date created
- 2017-04-27
- Resource type
- Major
- Rights statement
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