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Modeling of a folded spring supporting MEMS gyroscope

Stichwort:

statics, folded springs, MEMS, gyroscope, and suspension

Schöpfer:

Steward, Victoria

Advisor:

Pryputniewicz, Ryszard J.

Herausgeber:

Worcester Polytechnic Institute

Datum erstellt:

2003-10-07

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering