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stroboscopic illumination
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Phase modulating interferometry with stroboscopic illumination for characterization of MEMS
关键词:
phase modulation
,
stroboscopic illumination
,
MEMS characterization
, and
Interferometry
创造者:
Rodgers, Matthew T.
Advisor:
Furlong-Vazquez, Cosme
出版者:
Worcester Polytechnic Institute
创建日期:
2007-01-22
Resource Type:
Thesis
Degree:
ME
Unit (Department):
Mechanical Engineering
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Masters Theses
1
Year
2007
1
创造者
Rodgers, Matthew T.
1
Advisor
Furlong-Vazquez, Cosme
1
Contributor
Furlong-Vazquez, Cosme
1
Koslowske, Mark
1
Pryputniewicz, Ryszard J.
1
Tryggvason, Grétar
1
Unit (Department)
Mechanical Engineering
1
出版者
Worcester Polytechnic Institute
1
资源类型
Thesis
1