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Phase modulating interferometry with stroboscopic illumination for characterization of MEMS

Palavra-chave:

phase modulation, stroboscopic illumination, MEMS characterization , and Interferometry

O Criador:

Rodgers, Matthew T.

Advisor:

Furlong-Vazquez, Cosme

Editor:

Worcester Polytechnic Institute

Data Criada:

2007-01-22

Resource Type:

Thesis

Degree:

ME

Unit (Department):

Mechanical Engineering