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Phase modulating interferometry with stroboscopic illumination for characterization of MEMS
Palavra-chave:
phase modulation
,
stroboscopic illumination
,
MEMS characterization
, and
Interferometry
O Criador:
Rodgers, Matthew T.
Advisor:
Furlong-Vazquez, Cosme
Editor:
Worcester Polytechnic Institute
Data Criada:
2007-01-22
Resource Type:
Thesis
Degree:
ME
Unit (Department):
Mechanical Engineering
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Collections
Masters Theses
1
Year
2007
1
O Criador
Rodgers, Matthew T.
1
Advisor
Furlong-Vazquez, Cosme
1
Contributor
Furlong-Vazquez, Cosme
1
Koslowske, Mark
1
Pryputniewicz, Ryszard J.
1
Tryggvason, Grétar
1
Unit (Department)
Mechanical Engineering
1
Editor
Worcester Polytechnic Institute
1
Tipo de recurso
Thesis
1
