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micromechanical
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Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor
Keyword:
absorption
,
vibrometry
,
MEMS
,
Vibration
,
SEM
,
Hydrogen
,
Polymer
,
micromechanical
,
optoelectronic
,
cantilever
,
Sensor
,
frequency
,
AFM
,
Holography
,
Detection
,
Silicon
,
palladium
,
chemical
, and
resonance
Creator:
Arecco, Daniel
Advisor:
Pryputniewicz, Ryszard J.
Publisher:
Worcester Polytechnic Institute
Date Created:
2004-05-11
Resource Type:
Thesis
Degree:
MS
Unit (Department):
Mechanical Engineering
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Masters Theses
1
Year
2004
1
Creator
Arecco, Daniel
1
Advisor
Pryputniewicz, Ryszard J.
1
Contributor
Furlong, Cosme
1
Hagglund, Raymond R.
1
Pryputniewicz, Ryszard J.
1
Ruffin, Paul
1
Unit (Department)
Mechanical Engineering
1
Publisher
Worcester Polytechnic Institute
1
Resource type
Thesis
1
