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1. Development and implementation of automated interferometric microscope for study of MEMS inertial sensors

Stichwort:: MEMS, automation, Interferometry, and gyroscope
Schöpfer:: Marinis, Ryan Thomas
Advisor:: Pryputniewicz, Ryszard J.
Herausgeber:: Worcester Polytechnic Institute
Datum erstellt:: 2009-05-07
Resource Type:: Dissertation
Degree:: PhD
Unit (Department):: Mechanical Engineering