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Development of a wireless MEMS inertial system for health monitoring of structures

Stichwort:

angular rate, inertial sensors, MEMS, health monitoring, cantilever, wireless, RF, tilt and rotation, and microcontroller

Schöpfer:

Kok, Wing Hang (Ronald)

Advisor:

Furlong-Vazquez, Cosme

Herausgeber:

Worcester Polytechnic Institute

Datum erstellt:

2004-11-24

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering
Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor

Stichwort:

absorption, vibrometry, MEMS, Vibration, SEM, Hydrogen, Polymer, micromechanical, optoelectronic, cantilever, Sensor, frequency, AFM, Holography, Detection, Silicon, palladium, chemical, and resonance

Schöpfer:

Arecco, Daniel

Advisor:

Pryputniewicz, Ryszard J.

Herausgeber:

Worcester Polytechnic Institute

Datum erstellt:

2004-05-11

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering