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Development and implementation of automated interferometric microscope for study of MEMS inertial sensors

Keyword:

MEMS, automation, Interferometry, and gyroscope

Creator:

Marinis, Ryan Thomas

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2009-05-07

Resource Type:

Dissertation

Degree:

PhD

Unit (Department):

Mechanical Engineering