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Scanning Instruments
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Investigation of Measurement Artifacts Introduced By Horizontal Scanning Surface Profiling Instruments
Keyword:
Scanning Instruments
,
Fractal
,
Anisotropy
,
Surface
,
Scanning
, and
Surface Metrology
Creator:
Bergstrom, Torbjorn S
Advisor:
Brown, Christopher A.
Publisher:
Worcester Polytechnic Institute
Date Created:
2002-01-08
Resource Type:
Thesis
Degree:
MS
Unit (Department):
Manufacturing Engineering
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Masters Theses
1
Year
2002
1
Creator
Bergstrom, Torbjorn S
1
Advisor
Brown, Christopher A.
1
Contributor
Brown, Christopher A.
1
Unit (Department)
Manufacturing Engineering
1
Publisher
Worcester Polytechnic Institute
1
Resource type
Thesis
1
