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A Selective Encapsulation Solution For Packaging An Optical Micro Electro Mechanical System
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Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Temperature
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Modeling of a folded spring supporting MEMS gyroscope
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Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor
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Development of a wireless MEMS inertial system for health monitoring of structures
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Study and characetrization of plastic encapsulated packages for MEMS
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Laser beam interaction with materials for microscale applications
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Development of a modular interferometric microscopy system for characterization of MEMS
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Wavelength Conversion Using Reconfigurable Photonic Crystal MEMS/NEMS Structures
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Development and implementation of automated interferometric microscope for study of MEMS inertial sensors
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