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MEMS
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Development and implementation of automated interferometric microscope for study of MEMS inertial sensors
Keyword:
MEMS
,
automation
,
Interferometry
, and
gyroscope
Creator:
Marinis, Ryan Thomas
Advisor:
Pryputniewicz, Ryszard J.
Publisher:
Worcester Polytechnic Institute
Date Created:
2009-05-07
Resource Type:
Dissertation
Degree:
PhD
Unit (Department):
Mechanical Engineering
Laser beam interaction with materials for microscale applications
Keyword:
Laser micromachining
,
lattice-phonon vibration
,
numerical calculations
,
plasma effects
,
Fourier theory
,
hole profile
,
Silicon
,
analytical solutions
,
Heat Transfer
,
hole formation
,
MEMS
,
laser microdrilling
,
laser beam characteristics
, and
304 stainless steel
Creator:
Nowakowski, Krzysztof A.
Advisor:
Pryputniewicz, Ryszard J.
Publisher:
Worcester Polytechnic Institute
Date Created:
2005-12-12
Resource Type:
Dissertation
Degree:
PhD
Unit (Department):
Mechanical Engineering
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Creator
Marinis, Ryan Thomas
1
Nowakowski, Krzysztof A.
1
Advisor
Pryputniewicz, Ryszard J.
2
Contributor
Furlong, Cosme
1
Marinis, Thomas F.
1
Pryputniewicz, Ryszard J.
2
Sisson, Richard D.
1
Sullivan, John M.
1
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Unit (Department)
Mechanical Engineering
2
Publisher
Worcester Polytechnic Institute
2
Resource type
Dissertation
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2