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Filtering by: Keyword MEMS Collections PhD Dissertations

Development and implementation of automated interferometric microscope for study of MEMS inertial sensors

Keyword:

MEMS, automation, Interferometry, and gyroscope

Creator:

Marinis, Ryan Thomas

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2009-05-07

Resource Type:

Dissertation

Degree:

PhD

Unit (Department):

Mechanical Engineering
Laser beam interaction with materials for microscale applications

Keyword:

Laser micromachining, lattice-phonon vibration, numerical calculations, plasma effects, Fourier theory, hole profile, Silicon, analytical solutions, Heat Transfer, hole formation, MEMS, laser microdrilling, laser beam characteristics, and 304 stainless steel

Creator:

Nowakowski, Krzysztof A.

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2005-12-12

Resource Type:

Dissertation

Degree:

PhD

Unit (Department):

Mechanical Engineering