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Interferometry
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2007
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Phase modulating interferometry with stroboscopic illumination for characterization of MEMS
Keyword:
phase modulation
,
stroboscopic illumination
,
MEMS characterization
, and
Interferometry
Creator:
Rodgers, Matthew T.
Advisor:
Furlong-Vazquez, Cosme
Publisher:
Worcester Polytechnic Institute
Date Created:
2007-01-22
Resource Type:
Thesis
Degree:
ME
Unit (Department):
Mechanical Engineering
Development of a modular interferometric microscopy system for characterization of MEMS
Keyword:
Interferometry
,
shape and deformation measurement
,
Vibration
,
thermal
,
MEMS
,
vacuum
,
scanning white light
, and
vibrometry
Creator:
Klempner, Adam R.
Advisor:
Pryputniewicz, Ryszard J.
Publisher:
Worcester Polytechnic Institute
Date Created:
2007-01-04
Resource Type:
Thesis
Degree:
MS
Unit (Department):
Mechanical Engineering
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Year
2007
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2
Creator
Klempner, Adam R.
1
Rodgers, Matthew T.
1
Advisor
Furlong-Vazquez, Cosme
1
Pryputniewicz, Ryszard J.
1
Contributor
Burnham, Nancy A.
1
Furlong-Vazquez, Cosme
1
Koslowske, Mark
1
Marinis, Thomas F.
1
Pryputniewicz, Ryszard J.
2
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Unit (Department)
Mechanical Engineering
2
Publisher
Worcester Polytechnic Institute
2
Resource type
Thesis
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