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Filtering by: Unit (Department) Mechanical Engineering Keyword Silicon

Laser beam interaction with materials for microscale applications

Keyword:

Laser micromachining, lattice-phonon vibration, numerical calculations, plasma effects, Fourier theory, hole profile, Silicon, analytical solutions, Heat Transfer, hole formation, MEMS, laser microdrilling, laser beam characteristics, and 304 stainless steel

Creator:

Nowakowski, Krzysztof A.

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2005-12-12

Resource Type:

Dissertation

Degree:

PhD

Unit (Department):

Mechanical Engineering
Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor

Keyword:

absorption, vibrometry, MEMS, Vibration, SEM, Hydrogen, Polymer, micromechanical, optoelectronic, cantilever, Sensor, frequency, AFM, Holography, Detection, Silicon, palladium, chemical, and resonance

Creator:

Arecco, Daniel

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2004-05-11

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering