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Marinis, Ryan Thomas
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Keyword
automation
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Development and implementation of automated interferometric microscope for study of MEMS inertial sensors
Keyword:
MEMS
,
automation
,
Interferometry
, and
gyroscope
Creator:
Marinis, Ryan Thomas
Advisor:
Pryputniewicz, Ryszard J.
Publisher:
Worcester Polytechnic Institute
Date Created:
2009-05-07
Resource Type:
Dissertation
Degree:
PhD
Unit (Department):
Mechanical Engineering
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PhD Dissertations
1
Year
2009
1
Creator
Marinis, Ryan Thomas
[remove]
1
Advisor
Pryputniewicz, Ryszard J.
1
Contributor
Pryputniewicz, Ryszard J.
1
Sullivan, John M.
1
Tryggvason, Grétar
1
Willits, David S.
1
Unit (Department)
Mechanical Engineering
1
Publisher
Worcester Polytechnic Institute
1
Resource type
Dissertation
1
