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筛选: 创造者 Johari, Houri 出版者 Worcester Polytechnic Institute

Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Temperature

关键词:

Relative Humidity, MEMS, Temperature, Pressure, and Sensor

创造者:

Johari, Houri

Advisor:

Pryputniewicz, Ryszard J. and Savilonis, Brian James

出版者:

Worcester Polytechnic Institute

创建日期:

2003-05-12

Resource Type:

Thesis

Degree:

ME

Unit (Department):

Mechanical Engineering