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Filtering by: Creator Averkin, Sergey Nikolaevich Keyword plasma simulation Collections PhD Dissertations Resource type Dissertation

Keyword:: plasma simulation, plasma chemistry, global model, ion sources, and gas discharge devices
Creator:: Averkin, Sergey Nikolaevich
Advisor:: Gatsonis, Nikolaos A.
Publisher:: Worcester Polytechnic Institute
Date Created:: 2015-04-02
Resource Type:: Dissertation
Degree:: PhD
Unit (Department):: Mechanical Engineering

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