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Sulouff, R.
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Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Temperature
Keyword:
Relative Humidity
,
MEMS
,
Temperature
,
Pressure
, and
Sensor
Creator:
Johari, Houri
Advisor:
Pryputniewicz, Ryszard J.
and
Savilonis, Brian James
Publisher:
Worcester Polytechnic Institute
Date Created:
2003-05-12
Resource Type:
Thesis
Degree:
ME
Unit (Department):
Mechanical Engineering
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Masters Theses
1
Year
2003
1
Creator
Johari, Houri
1
Advisor
Pryputniewicz, Ryszard J.
1
Savilonis, Brian James
1
Contributor
Blandino, John J.
1
Furlong, Cosme
1
Pryputniewicz, Ryszard J.
1
Savilonis, Brian J.
1
Sulouff, R.
[remove]
1
Unit (Department)
Mechanical Engineering
1
Publisher
Worcester Polytechnic Institute
1
Resource type
Thesis
1
