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筛选: Contributor Pryputniewicz, Ryszard J. 关键词 stroboscopic illumination

Phase modulating interferometry with stroboscopic illumination for characterization of MEMS

关键词:

phase modulation, stroboscopic illumination, MEMS characterization , and Interferometry

创造者:

Rodgers, Matthew T.

Advisor:

Furlong-Vazquez, Cosme

出版者:

Worcester Polytechnic Institute

创建日期:

2007-01-22

Resource Type:

Thesis

Degree:

ME

Unit (Department):

Mechanical Engineering