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Pryputniewicz, Ryszard J.
删除限定条件 Contributor: Pryputniewicz, Ryszard J.
关键词
automation
删除限定条件 关键词: automation
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Development and implementation of automated interferometric microscope for study of MEMS inertial sensors
关键词:
MEMS
,
automation
,
Interferometry
, and
gyroscope
创造者:
Marinis, Ryan Thomas
Advisor:
Pryputniewicz, Ryszard J.
出版者:
Worcester Polytechnic Institute
创建日期:
2009-05-07
Resource Type:
Dissertation
Degree:
PhD
Unit (Department):
Mechanical Engineering
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PhD Dissertations
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Year
2009
1
创造者
Marinis, Ryan Thomas
1
Advisor
Pryputniewicz, Ryszard J.
1
Contributor
Pryputniewicz, Ryszard J.
[remove]
1
Sullivan, John M.
1
Tryggvason, Grétar
1
Willits, David S.
1
Unit (Department)
Mechanical Engineering
1
出版者
Worcester Polytechnic Institute
1
资源类型
Dissertation
1