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Filtro per: Contributor Pryputniewicz, Ryszard J. Creatore Marinis, Ryan Thomas

1. Development and implementation of automated interferometric microscope for study of MEMS inertial sensors

Parola chiave:: MEMS, automation, Interferometry, and gyroscope
Creatore:: Marinis, Ryan Thomas
Advisor:: Pryputniewicz, Ryszard J.
Editore:: Worcester Polytechnic Institute
data di creazione:: 2009-05-07
Resource Type:: Dissertation
Degree:: PhD
Unit (Department):: Mechanical Engineering