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Filtrado por: Contributor Pryputniewicz, Ryszard J. Creador Marinis, Ryan Thomas

Development and implementation of automated interferometric microscope for study of MEMS inertial sensors

Palabra clave:

MEMS, automation, Interferometry, and gyroscope

Creador:

Marinis, Ryan Thomas

Advisor:

Pryputniewicz, Ryszard J.

Editor:

Worcester Polytechnic Institute

Fecha de Creacion:

2009-05-07

Resource Type:

Dissertation

Degree:

PhD

Unit (Department):

Mechanical Engineering