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Contributor
Marinis, Thomas F.
删除限定条件 Contributor: Marinis, Thomas F.
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Development of a modular interferometric microscopy system for characterization of MEMS
关键词:
Interferometry
,
shape and deformation measurement
,
Vibration
,
thermal
,
MEMS
,
vacuum
,
scanning white light
, and
vibrometry
创造者:
Klempner, Adam R.
Advisor:
Pryputniewicz, Ryszard J.
出版者:
Worcester Polytechnic Institute
创建日期:
2007-01-04
Resource Type:
Thesis
Degree:
MS
Unit (Department):
Mechanical Engineering
Laser beam interaction with materials for microscale applications
关键词:
Laser micromachining
,
lattice-phonon vibration
,
numerical calculations
,
plasma effects
,
Fourier theory
,
hole profile
,
Silicon
,
analytical solutions
,
Heat Transfer
,
hole formation
,
MEMS
,
laser microdrilling
,
laser beam characteristics
, and
304 stainless steel
创造者:
Nowakowski, Krzysztof A.
Advisor:
Pryputniewicz, Ryszard J.
出版者:
Worcester Polytechnic Institute
创建日期:
2005-12-12
Resource Type:
Dissertation
Degree:
PhD
Unit (Department):
Mechanical Engineering
Study and characetrization of plastic encapsulated packages for MEMS
关键词:
MEMS
,
packaging
,
plastic encapsulation
,
finite difference methods
,
OEH methodology
, and
Fick's second law of diffusion
创造者:
Deshpande, Anjali W
Advisor:
Pryputniewicz, Ryszard J.
出版者:
Worcester Polytechnic Institute
创建日期:
2005-01-14
Resource Type:
Thesis
Degree:
MS
Unit (Department):
Mechanical Engineering
Computational and experimental investigations of laser drilling and welding for microelectronic packaging
关键词:
Microdrilling
,
Microelectronic packaging
,
Computational modeling
,
Laser micromachining
,
Optoelectronic holography
, and
Microwelding
创造者:
Han, Wei
Advisor:
Pryputniewicz, Ryszard J.
出版者:
Worcester Polytechnic Institute
创建日期:
2004-05-13
Resource Type:
Dissertation
Degree:
PhD
Unit (Department):
Mechanical Engineering
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创造者
Deshpande, Anjali W
1
Han, Wei
1
Klempner, Adam R.
1
Nowakowski, Krzysztof A.
1
Advisor
Pryputniewicz, Ryszard J.
4
Contributor
Burnham, Nancy A.
1
Furlong, Cosme
3
Liang, Jianyu
1
Marinis, Thomas F.
[remove]
4
Pryputniewicz, Ryszard J.
4
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Contributors
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Unit (Department)
Mechanical Engineering
4
出版者
Worcester Polytechnic Institute
4
资源类型
Dissertation
2
Thesis
2
