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Filtrado por: Contributor Marinis, Thomas F. Eliminar la restricciónContributor: Marinis, Thomas F.

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Development of a modular interferometric microscopy system for characterization of MEMS

Palabra clave:

Interferometry, shape and deformation measurement, Vibration, thermal, MEMS, vacuum, scanning white light, and vibrometry

Creador:

Klempner, Adam R.

Advisor:

Pryputniewicz, Ryszard J.

Editor:

Worcester Polytechnic Institute

Fecha de Creacion:

2007-01-04

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering
Laser beam interaction with materials for microscale applications

Palabra clave:

Laser micromachining, lattice-phonon vibration, numerical calculations, plasma effects, Fourier theory, hole profile, Silicon, analytical solutions, Heat Transfer, hole formation, MEMS, laser microdrilling, laser beam characteristics, and 304 stainless steel

Creador:

Nowakowski, Krzysztof A.

Advisor:

Pryputniewicz, Ryszard J.

Editor:

Worcester Polytechnic Institute

Fecha de Creacion:

2005-12-12

Resource Type:

Dissertation

Degree:

PhD

Unit (Department):

Mechanical Engineering
Study and characetrization of plastic encapsulated packages for MEMS

Palabra clave:

MEMS, packaging, plastic encapsulation, finite difference methods, OEH methodology, and Fick's second law of diffusion

Creador:

Deshpande, Anjali W

Advisor:

Pryputniewicz, Ryszard J.

Editor:

Worcester Polytechnic Institute

Fecha de Creacion:

2005-01-14

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering
Computational and experimental investigations of laser drilling and welding for microelectronic packaging

Palabra clave:

Microdrilling, Microelectronic packaging, Computational modeling, Laser micromachining, Optoelectronic holography, and Microwelding

Creador:

Han, Wei

Advisor:

Pryputniewicz, Ryszard J.

Editor:

Worcester Polytechnic Institute

Fecha de Creacion:

2004-05-13

Resource Type:

Dissertation

Degree:

PhD

Unit (Department):

Mechanical Engineering

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PhD Dissertations2
Masters Theses2

Year

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Current results range from 2004 to 2007

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Creador

Deshpande, Anjali W1
Han, Wei1
Klempner, Adam R.1
Nowakowski, Krzysztof A.1

Advisor

Pryputniewicz, Ryszard J.4

Contributor

Burnham, Nancy A.1
Furlong, Cosme3
Liang, Jianyu1
Marinis, Thomas F.[remove]4
Pryputniewicz, Ryszard J.4
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Unit (Department)

Mechanical Engineering4

Editor

Worcester Polytechnic Institute4

Tipo de recurso

Dissertation2
Thesis2

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