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Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor

Keyword:

absorption, vibrometry, MEMS, Vibration, SEM, Hydrogen, Polymer, micromechanical, optoelectronic, cantilever, Sensor, frequency, AFM, Holography, Detection, Silicon, palladium, chemical, and resonance

Creator:

Arecco, Daniel

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2004-05-11

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering
Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Temperature

Keyword:

Relative Humidity, MEMS, Temperature, Pressure, and Sensor

Creator:

Johari, Houri

Advisor:

Pryputniewicz, Ryszard J. and Savilonis, Brian James

Publisher:

Worcester Polytechnic Institute

Date Created:

2003-05-12

Resource Type:

Thesis

Degree:

ME

Unit (Department):

Mechanical Engineering