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Burnham, Nancy A.
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Year
2007
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Development of a modular interferometric microscopy system for characterization of MEMS
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Masters Theses
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Year
2007
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Klempner, Adam R.
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Pryputniewicz, Ryszard J.
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Contributor
Burnham, Nancy A.
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Marinis, Thomas F.
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Pryputniewicz, Ryszard J.
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Sullivan, John M.
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Mechanical Engineering
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Worcester Polytechnic Institute
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Thesis
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