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Filtering by: Advisor Savilonis, Brian James Keyword MEMS

Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Temperature

Keyword:

Relative Humidity, MEMS, Temperature, Pressure, and Sensor

Creator:

Johari, Houri

Advisor:

Pryputniewicz, Ryszard J. and Savilonis, Brian James

Publisher:

Worcester Polytechnic Institute

Date Created:

2003-05-12

Resource Type:

Thesis

Degree:

ME

Unit (Department):

Mechanical Engineering