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Filtering by: Advisor Pryputniewicz, Ryszard J. Publisher Worcester Polytechnic Institute Resource type Thesis

Development of a modular interferometric microscopy system for characterization of MEMS

Study and characetrization of plastic encapsulated packages for MEMS

Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor

Joule heat effects on reliability of RF MEMS switches

Modeling of a folded spring supporting MEMS gyroscope

Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Tempe...

Development of a process for characterization of Nd:YAG crystals