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Development of a modular interferometric microscopy system for characterization of MEMS
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Study and characetrization of plastic encapsulated packages for MEMS
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Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor
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Joule heat effects on reliability of RF MEMS switches
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Modeling of a folded spring supporting MEMS gyroscope
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Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Temperature
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Development of a process for characterization of Nd:YAG crystals
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