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Filtering by: Advisor Pryputniewicz, Ryszard J. Remove constraint Advisor: Pryputniewicz, Ryszard J. Collections Masters Theses Remove constraint Collections: Masters Theses

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Development of a modular interferometric microscopy system for characterization of MEMS

Keyword:

Interferometry, shape and deformation measurement, Vibration, thermal, MEMS, vacuum, scanning white light, and vibrometry

Creator:

Klempner, Adam R.

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2007-01-04

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering
Study and characetrization of plastic encapsulated packages for MEMS

Keyword:

MEMS, packaging, plastic encapsulation, finite difference methods, OEH methodology, and Fick's second law of diffusion

Creator:

Deshpande, Anjali W

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2005-01-14

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering
Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor

Keyword:

absorption, vibrometry, MEMS, Vibration, SEM, Hydrogen, Polymer, micromechanical, optoelectronic, cantilever, Sensor, frequency, AFM, Holography, Detection, Silicon, palladium, chemical, and resonance

Creator:

Arecco, Daniel

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2004-05-11

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering
Joule heat effects on reliability of RF MEMS switches

Keyword:

MEMS switches, thermal effects, and RF switches

Creator:

Machate, Malgorzata S

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2003-10-07

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering
Modeling of a folded spring supporting MEMS gyroscope

Keyword:

statics, folded springs, MEMS, gyroscope, and suspension

Creator:

Steward, Victoria

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2003-10-07

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering
Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Temperature

Keyword:

Relative Humidity, MEMS, Temperature, Pressure, and Sensor

Creator:

Johari, Houri

Advisor:

Pryputniewicz, Ryszard J. and Savilonis, Brian James

Publisher:

Worcester Polytechnic Institute

Date Created:

2003-05-12

Resource Type:

Thesis

Degree:

ME

Unit (Department):

Mechanical Engineering
Development of a process for characterization of Nd:YAG crystals

Keyword:

Nd:YAG, crystals, measurement of lasers, laser beam, and laser

Creator:

Bronski, Mark T

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2003-04-09

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering

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Masters Theses[remove]7

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Creator

Arecco, Daniel1
Bronski, Mark T1
Deshpande, Anjali W1
Johari, Houri1
Klempner, Adam R.1
more Creators »

Advisor

Pryputniewicz, Ryszard J.[remove]7
Savilonis, Brian James1

Contributor

Blandino, John J.1
Burnham, Nancy A.1
Furlong, Cosme6
Grabbe, Dimitry1
Hagglund, Raymond R.4
more Contributors »

Unit (Department)

Mechanical Engineering7

Publisher

Worcester Polytechnic Institute7

Resource type

Thesis7

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