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- 关键词:
- Laser micromachining, lattice-phonon vibration, numerical calculations, plasma effects, Fourier theory, hole profile, Silicon, analytical solutions, Heat Transfer, hole formation, MEMS, laser microdrilling, laser beam characteristics, and 304 stainless steel
- 创造者:
- Nowakowski, Krzysztof A.
- Advisor:
- Pryputniewicz, Ryszard J.
- 出版者:
- Worcester Polytechnic Institute
- 创建日期:
- 2005-12-12
- Resource Type:
- Dissertation
- Degree:
- PhD
- Unit (Department):
- Mechanical Engineering
