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Filtro per: Advisor Pryputniewicz, Ryszard J. Contributor Savilonis, Brian J.

1. Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Temperature

Parola chiave:: Relative Humidity, MEMS, Temperature, Pressure, and Sensor
Creatore:: Johari, Houri
Advisor:: Pryputniewicz, Ryszard J. and Savilonis, Brian James
Editore:: Worcester Polytechnic Institute
data di creazione:: 2003-05-12
Resource Type:: Thesis
Degree:: ME
Unit (Department):: Mechanical Engineering